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Modeling and control of a piezoelectric actuator for active and adaptive optics

Author: Marek Hudec


Bakalářské práce 2013


This thesis develops mathematical models of deformable plates used in adaptive and active optics. In particular, an Au-coated cantilevered plate made of silicon with a piezoelectric patch bonded to t is investigated. Models are derived using analytical techniques and finite element method. The results are compared to measurements obtained using a laser beam reflected to a line CCD camera. on linear effects such as creep and hysteresis are carefully investigated and included in the model. Strategies for shape control are outlined.